Silicon Wafer
We provide a wide range of silicon wafers under our own brand, carrying out integrated processing based on our proprietary know-how. Currently, our products are used by numerous device manufacturers as well as universities and government institutions.
Silicon Wafer
Silicon wafer is a wafer made of high-purity silicon, produced by slicing a cylindrical single-crystal silicon ingot, known as an ingot, into thin slices. We provide silicon wafers for various applications, such as dummy, monitor, and prime wafers.
Applications
In general, large-diameter wafers are used for MPUs with large chip sizes and for DRAM or flash memory, which require mass production to reduce costs. They are most commonly used in the manufacturing of integrated circuits (ICs/LSIs) and other discrete products.
Monitor Wafer
- These wafers are used when adjustments are required at each stage of the manufacturing process before actual production.
- Applications
- Monitor wafers, which are inexpensive alternatives to high-spec, high-cost prime wafers, are used during various process steps and condition settings, such as checking deposition and epitaxial growth rates or measuring equipment tolerance to variations in substrate thickness.
- Features
- We offer a wide range of wafers to meet diverse customer needs (available in sizes from 2 to 12inch).
Our wafers deliver reliable quality that ensures satisfaction for various applications such as particle inspection and process monitoring.
Dummy Wafer
- Dummy wafers (also called test wafers) are wafers that, unlike regular production wafers, are primarily used for experiments and inspections.
- Applications
- In manufacturing equipments, dummy wafers are often used at the initial stage to improve manufacturing process stability, and they are also used for transport checks and evaluation of processed shapes.
Since they are primarily used for experiments and testing, wafer size and thickness are often critical. - Features
- We offer a wide range of wafers to meet diverse customer needs (available in sizes from 2 to 12inch).
Our wafers deliver reliable quality that ensures satisfaction for various applications such as particle inspection and process monitoring.
Prime Wafer
- Prime wafers are strictly controlled in terms of resistivity, flatness, and particle levels, all of which are critical factors affecting device performance.
- Applications
- Prime wafers are wafers used for manufacturing IC chips and other devices. They are used to form circuit patterns on substrates and manufacture devices.
- Features
- We mainly provide P+N+ (heavily doped) wafers, and also support custom specifications, including lightly doped types.
(Available in sizes from 5 to 12inch.)
FZ Wafer
- The FZ (Floating Zone) method refers to a single crystal growth process that differs from the CZ (Czochralski) method.
- Applications
- The applications of FZ wafers include MEMS, diode, IGBT, RF device, thyristors(rectifier), high efficiency solar cell and optical products.
- Features
- We offer NTD wafers irradiated with neutrons, as well as impurity-doped GDFZ silicon wafers, for applications including high-frequency devices, MEMS, and power devices.
We support a wide range of needs, from R&D to mass production. (Available in sizes from 5 to 8inch)
Epi Wafer
- "Epi" stands for epitaxial growth, which is a process where a crystal is grown on a substrate and aligns with the crystal lattice of the base material.
- Applications
- Silicon epitaxial wafers are widely used for devices such as diodes and transistors, as well as for bipolar and MOS-type ICs.
- Features
- We offer high-quality custom epitaxial wafers.
| Thickness | Resistivity | |
|---|---|---|
|
N-type Epitaxial Wafer |
||
| Sb・As・Phos
-doped substrate |
to 130µm | 0.01-100Ω.cm |
|
P-type Epitaxial Wafer |
||
| Boron-doped
substrate |
to 130µm | 0.01-100Ω.cm |
| Special epitaxial
and multi-layer |
to 150µm | to 150Ω |
Film-coated Wafer
- Wafers that have undergone film deposition are called film-coated wafers.
- Applications
- In wafer deposition (growth of films), there are insulating films used as interlayer dielectrics, metallic films as conductive materials, as well as other process materials such as resists and protective films.
- Features
- We offer various deposition services, including metal films and thermal oxide films, to meet your specific requirements. (Available in sizes from 2 to 12inch.)
- Thermal oxide films, Si3N4 films, TEOS, BPSG, Cu films, Al films, Ti films, Ta films, TaN films, TiN films, etc．
- We also offer photolithography processing, including the creation of custom masks, as well as patterning with standard masks.
Others, Special Specification Wafer
- Features
- We offer wafers with special specifications such as 100μm thickness, unique orientation, LM processing, and square chips, available in small quantities for research purposes. (Sizes and specifications are negotiable.)